Surface measurement errors using commercial scanning white light interferometers
نویسندگان
چکیده
منابع مشابه
Step-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry.
Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon <1 0 0> substrate. These sputtered Gold-Coated micro-cantilevers were later surface functionalized. Scanning Electron Microscopy, Atomic Force Microscopy and Optical SWLI using LASER probe are employed to characterize the morphology and image measurement of the micro-cantilever arrays, resp...
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ژورنال
عنوان ژورنال: Measurement Science and Technology
سال: 2007
ISSN: 0957-0233,1361-6501
DOI: 10.1088/0957-0233/19/1/015303